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Scanning electron microscopy and X-ray microanalysis
Résumé
1. Electron beam-specimen interactions: interaction volume 1; 2. Backscattered electrons 15; 3. Secondary electrons 29; 4. X-rays 39; 5. Scanning Electron Microscope (SEM) instrumentation 65; 6. Image formation 93; 7. SEM image interpretation 111; 8. The visibility of features in SEM images 123; 9. Image defects 133; 10. High resolution imaging 147; 11. Low beam energy SEM 165; 12.
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Variable Pressure Scanning Electron Microscopy (VPSEM) 173; 13. ImageJ and Fiji 187; 14. SEM imaging checklist 195; 15. SEM case studies 201; 16. Energy dispersive X-ray spectrometry: physical principles and user-selected parameters 209; 17. DTSA-II EDS software 236; 18. Qualitative elemental analysis by energy dispersive X-ray spectrometry 265; 19. Quantitative analysis: from k-ratio to composition 289; 20. Quantitative analysis: the SEM/EDS elemental microanalysis k-ratio procedure for bulk specimens, step-by-step 309; 21. Trace analysis by SEM/EDS 341; 22. Low beam energy X-ray microanalysis 359; 23. Analysis of specimens with special geometry: irregular bulk objects and particles 381; 24. Compositional mapping 413; 25. Attempting electron-excited X-ray microanalysis in the Variable Pressure Scanning Electron Microscope (VPSEM) 441; 26. Energy dispersive X-ray microanalysis checklist 461; 27. X-ray microanalysis case studies 471; 28. Cathodoluminescence 481; 29. Characterizing crystalline materials in the SEM 491; 30. Focused ion beam applications in the SEM laboratory 517; 31. Ion beam microscopy 529; Supplementary information 541; Appendix 542; Index 547; Contents XV.
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